Field Emission Photocathode Arrray for multibeam electron lithography.
Journal Article
(2001)
Author(s)
MJJ Wieland (TU Delft - ImPhys/Charged Particle Optics)
BJ Kampherbeek (TU Delft - ImPhys/Charged Particle Optics)
P Addessi (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:446818fd-c3e1-43e2-b77f-ab18956bdfc3
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Publication Year
2001
Research Group
ImPhys/Charged Particle Optics
Volume number
57-58
Pages (from-to)
155-161
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