High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics
Conference Paper
(2008)
Author(s)
T. Zoumpoulidis (TU Delft - Old - EWI Sect. ECTM)
M. Bartek (TU Delft - Old - EWI Sect. ECTM)
P de Graaf (External organisation)
Ronald Dekker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:48f47911-3dab-4d3d-836b-cfc43618b37f
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
1528-1531
ISBN (print)
978-3-00-025217-4
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