Field emission photocathode array for high throughput lithography.
Conference Paper
(2001)
Author(s)
AHV van Veen (TU Delft - ImPhys/Charged Particle Optics)
BJ Kampherbeek (TU Delft - ImPhys/Charged Particle Optics)
MJJ Wieland (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:4fb65f1e-2219-42ca-b2ec-524c72428f75
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Publication Year
2001
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
127-128
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