Field emission photocathode array for high throughput lithography.

Conference paper (2001)

Authors

AHV van Veen ImPhys/Charged Particle Optics
BJ Kampherbeek ImPhys/Charged Particle Optics
MJJ Wieland ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2001

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics