Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C

Journal Article (2014)
Author(s)

S. Vollebregt (TU Delft - Electronic Components, Technology and Materials)

FD Tichelaar (QN/High Resolution Electron Microscopy)

H. Schellevis (TU Delft - Electronic Components, Technology and Materials)

Kees Beenakker (TU Delft - Electrical Engineering, Mathematics and Computer Science)

R. Ishihara (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.carbon.2014.01.035
More Info
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Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
May
Volume number
71
Pages (from-to)
249-256

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