Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C
Journal Article
(2014)
Author(s)
S. Vollebregt (TU Delft - Electronic Components, Technology and Materials)
FD Tichelaar (QN/High Resolution Electron Microscopy)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
Kees Beenakker (TU Delft - Electrical Engineering, Mathematics and Computer Science)
R. Ishihara (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.carbon.2014.01.035
To reference this document use:
https://resolver.tudelft.nl/uuid:5235bd35-8237-464d-b7e0-367809070693
More Info
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Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
May
Volume number
71
Pages (from-to)
249-256
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