Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph
Journal Article
(2008)
Author(s)
S Grabarnik (TU Delft - Electronic Instrumentation)
A Emadi (TU Delft - Electronic Instrumentation)
HW Wu (TU Delft - Electronic Instrumentation)
G. de Graaf (TU Delft - Electronic Instrumentation)
G.V. Vdovin (TU Delft - Electronic Instrumentation)
R. F. Wolfenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:5287c5a5-e92e-4066-a51b-dde6cc37b7c7
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Publication Year
2008
Research Group
Electronic Instrumentation
Issue number
6
Volume number
18
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