Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

Grabarnik, S; Emadi, A; Wu, H.W.; de Graaf, G. de; Vdovin, GV; Wolffenbuttel, R.F.

Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

Journal article (2008)

Authors

S Grabarnik Electronic Instrumentation

A Emadi Electronic Instrumentation

H.W. Wu Electronic Instrumentation

G. de de Graaf Electronic Instrumentation

GV Vdovin Electronic Instrumentation

R.F. Wolffenbuttel Electronic Instrumentation

Research Group

Electronic Instrumentation

Elektrotechniek Techniek

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Published Date

2008

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Research Group

Electronic Instrumentation

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