A 117-dB In-Band CMRR 98.5-dB SNR Capacitance-to-Digital Converter for Sub-nm Displacement Sensing with an Electrically Floating Target

Journal article (2020)

Authors

H. Jiang Electronic Instrumentation - EEMCS
Samira Amani Murata Electronics
J.G. Vogel Electronic Instrumentation - EEMCS
S. Heidary Shalmany Electronic Instrumentation - EEMCS
S. Nihtianova Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Readout Energy-efficient Chopping Capacitance-to-digital converter (CDC) Electric field interference immunity Sub-nm displacement sensing
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Published Date

01-12-2020

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

This article describes a high-performance capacitance-to-digital converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5-dB SNR in a 1-ms conversion time. With a sensing O 8-mm probe and a 25μm stand-off distance from the target, it achieves 0.18-nm resolution. Moreover, it offers an in-band common-mode rejection ratio (CMRR) higher than 117 dB, providing decent electric field interference immunity.

Files

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