Influence of depth in helium desorption from cavities induced by 3-He implantation in silicon
Conference Paper
(2001)
Author(s)
R Delamare (External organisation)
E Ntsoenzok (External organisation)
F. Labohm (TU Delft - Old - Section Defects in Materials)
A van Veen (TU Delft - Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
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https://resolver.tudelft.nl/uuid:561e90b6-6cea-4c3c-91f4-00e8debf8b41
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Publication Year
2001
Research Group
Old - Section Defects in Materials
Pages (from-to)
303-308
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