6 records found
1
Deuteron implantation into hexagonal silicon carbide: defects and deuterium behavior
Growth mechanism of cavities in MeV helium implanted silicon
Gettering by overpressurized bubbles induced by high-energy He-implantation in silicon
Anormal growth of cavities in MeV He implanted Si covered with a thin Al foil
Influence of depth in helium desorption from cavities induced by 3-He implantation in silicon
Helium desorption from cavities induced by 3-He and 4-He implantation in silicon