Helium desorption from cavities induced by 3-He and 4-He implantation in silicon
Journal Article
(2000)
Author(s)
S Godey (External organisation)
E Ntsoenzok (External organisation)
T Sauvage (External organisation)
A van Veen (TU Delft - Old - Section Defects in Materials)
F. Labohm (TU Delft - Old - Section Defects in Materials)
MF Beaufort (External organisation)
JF Barbot (External organisation)
Research Group
Old - Section Defects in Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:d3df2518-9fb3-4d97-8a82-150431868c61
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Publication Year
2000
Research Group
Old - Section Defects in Materials
Issue number
1-3
Volume number
73
Pages (from-to)
54-59
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