Helium desorption from cavities induced by 3-He and 4-He implantation in silicon

Journal article (2000)

Authors

S Godey External organisation
E Ntsoenzok External organisation
T Sauvage External organisation
A van Veen Old - Section Defects in Materials
F. Labohm Old - Section Defects in Materials
MF Beaufort External organisation
JF Barbot External organisation
Research Group
Old - Section Defects in Materials
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Published Date

2000

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials