7 records found
1
Helium implantation in silicon: the effects of implantation temperature
Helium implantation defects in SiC: a thermal helium desorption spectrometry investigation
Helium implantation defects in SiC studied by thermal helium desorption
On the effects of implantation temperature in helium implanted silicon
Defects created by helium implantation at different temperatures in silicon
Cavities in He-implanted SiC
Helium desorption from cavities induced by 3-He and 4-He implantation in silicon