Defects created by helium implantation at different temperatures in silicon

Conference paper (2001)

Authors

ML David External organisation
E Oliveiro External organisation
A Ratchenkova External organisation
NN Gerasimenko External organisation
A Declemy External organisation
JF Barbot External organisation
A van Veen Old - Section Defects in Materials
MF Beaufort External organisation
Research Group
Old - Section Defects in Materials
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Published Date

2001

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials