Defects created by helium implantation at different temperatures in silicon

Conference Paper (2001)
Authors

ML David (External organisation)

E Oliveiro (External organisation)

A Ratchenkova (External organisation)

NN Gerasimenko (External organisation)

A Declemy (External organisation)

JF Barbot (External organisation)

A van Veen (Old - Section Defects in Materials)

MF Beaufort (External organisation)

Research Group
Old - Section Defects in Materials
More Info
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Publication Year
2001
Research Group
Old - Section Defects in Materials
Pages (from-to)
285-290

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