Defects created by helium implantation at different temperatures in silicon
Conference Paper
(2001)
Author(s)
ML David (External organisation)
E Oliveiro (External organisation)
A Ratchenkova (External organisation)
NN Gerasimenko (External organisation)
A Declemy (External organisation)
JF Barbot (External organisation)
A van Veen (TU Delft - Old - Section Defects in Materials)
MF Beaufort (External organisation)
Research Group
Old - Section Defects in Materials
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https://resolver.tudelft.nl/uuid:b3f553d4-ee83-40b1-a61d-941e3298fdef
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Publication Year
2001
Research Group
Old - Section Defects in Materials
Pages (from-to)
285-290
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