Helium implantation defects in SiC: a thermal helium desorption spectrometry investigation

Journal Article (2003)
Author(s)

E Oliviero (External organisation)

MF Beaufort (External organisation)

JF Barbot (External organisation)

A van Veen (TU Delft - Old - Section Defects in Materials)

AV Fedorov (TU Delft - Old - Section Defects in Materials)

Research Group
Old - Section Defects in Materials
More Info
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Publication Year
2003
Research Group
Old - Section Defects in Materials
Volume number
93
Pages (from-to)
231-238

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