Helium implantation defects in SiC studied by thermal helium desorption
Journal Article
(2002)
Author(s)
E Oliveiro (External organisation)
A van Veen (TU Delft - Old - Section Defects in Materials)
AV Fedorov (TU Delft - Old - Section Defects in Materials)
MF Beaufort (External organisation)
JF Barbot (External organisation)
Research Group
Old - Section Defects in Materials
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https://resolver.tudelft.nl/uuid:f3a6ab2f-872b-4f04-977d-33d91fc8f26a
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Publication Year
2002
Research Group
Old - Section Defects in Materials
Volume number
186
Pages (from-to)
223-228
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