On the effects of implantation temperature in helium implanted silicon
Journal Article
(2002)
Author(s)
E Oliviero (External organisation)
ML David (External organisation)
MF Beaufort (External organisation)
JF Barbot (External organisation)
A van Veen (TU Delft - Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:f09127d2-5345-432a-bbdf-910eae3acaf2
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Publication Year
2002
Research Group
Old - Section Defects in Materials
Volume number
81
Pages (from-to)
4201-4203
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