7 records found
1
Helium implantation in silicon: the effects of implantation temperature
Helium implantation defects in SiC: a thermal helium desorption spectrometry investigation
On the effects of implantation temperature in helium implanted silicon
Helium implantation defects in SiC studied by thermal helium desorption
Cavities in He-implanted SiC
Defects created by helium implantation at different temperatures in silicon
Helium desorption from cavities induced by 3-He and 4-He implantation in silicon