Growth mechanism of cavities in MeV helium implanted silicon
Journal Article
(2002)
Authors
J Grisolia (External organisation)
A Claverie (External organisation)
G Ben-Assayag (External organisation)
E Ntsoenzok (External organisation)
F Labohm (Old - Section Defects in Materials)
A van Veen (Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
To reference this document use:
https://resolver.tudelft.nl/9a2c83f7-23f2-4419-b76a-08ecefc6d66d
More Info
expand_more
expand_more
Publication Year
2002
Research Group
Old - Section Defects in Materials
Volume number
91
Pages (from-to)
9027-9030
No files available
Metadata only record. There are no files for this record.