Growth mechanism of cavities in MeV helium implanted silicon

Journal article (2002)

Authors

J Grisolia External organisation
A Claverie External organisation
G Ben-Assayag External organisation
E Ntsoenzok External organisation
F. Labohm Old - Section Defects in Materials
A van Veen Old - Section Defects in Materials
Research Group
Old - Section Defects in Materials
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Published Date

2002

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials