Gettering by overpressurized bubbles induced by high-energy He-implantation in silicon
Conference Paper
(2002)
Author(s)
G Regula (External organisation)
R El Bouayadi (External organisation)
B Pichaud (External organisation)
S Godey (External organisation)
R Delamare (External organisation)
E Ntsoenzok (External organisation)
A van Veen (TU Delft - Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
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https://resolver.tudelft.nl/uuid:6e0dcac1-996c-4a24-9314-202432a25646
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Publication Year
2002
Research Group
Old - Section Defects in Materials
Pages (from-to)
F4.2/1-F4.2/6
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