Gettering by overpressurized bubbles induced by high-energy He-implantation in silicon

Conference paper (2002)

Authors

G Regula External organisation
R El Bouayadi External organisation
B Pichaud External organisation
S Godey External organisation
R Delamare External organisation
E Ntsoenzok External organisation
A van Veen Old - Section Defects in Materials
Research Group
Old - Section Defects in Materials
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Published Date

2002

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials