Lateral-transistor test structures for evaluating the effectiveness of surface doping techniques
Journal Article
(2012)
Author(s)
L Qi (TU Delft - Electronic Components, Technology and Materials)
G. Lorito (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/TSM.2012.2206834
To reference this document use:
https://resolver.tudelft.nl/uuid:5963eed1-2de0-4c0b-a308-89f5ecf207b8
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
4
Volume number
25
Pages (from-to)
581-588
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