Fabrication of a CMOS compatible vertical accelerometer
Conference Paper
(2003)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
HTM Pham (TU Delft - Electronic Components, Technology and Materials)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Paddy J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:5ae35b38-5dc1-4c64-8d04-db5830d233cb
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Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
635-638
ISBN (print)
972-98603-1-9
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