Linear nano-positioning stage using ferrofluid bearings
Conference Paper
(2014)
Author(s)
R. Deng (TU Delft - Mechatronic Systems Design)
S van Veen (External organisation)
M Cafe (External organisation)
Jo Spronck (TU Delft - Mechatronic Systems Design)
RH Munnig Schmidt (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:5d71ae08-383f-4a4e-aed5-10f151a5e1d5
More Info
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Publication Year
2014
Language
English
Research Group
Mechatronic Systems Design
Pages (from-to)
372-375
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