Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices
Sebastian Heedt (TU Delft - BUS/Quantum Delft, Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre, Microsoft Quantum Lab Delft)
Marina Quintero-Pérez (TU Delft - BUS/Quantum Delft, Microsoft Quantum Lab Delft)
Francesco Borsoi (TU Delft - QCD/Veldhorst Lab, Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre)
Nick van Loo (TU Delft - QRD/Kouwenhoven Lab, Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre)
Grzegorz P. Mazur (TU Delft - QRD/Kouwenhoven Lab, Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre)
Mark Ammerlaan (TU Delft - ALG/General, Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre)
Kongyi Li (TU Delft - BUS/Quantum Delft, TU Delft - QuTech Advanced Research Centre, Kavli institute of nanoscience Delft)
Svetlana Korneychuk (TU Delft - QRD/Kouwenhoven Lab, Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre)
May An Y. van de Poll (Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre, TU Delft - QCD/Vandersypen Lab)
Nick de Jong (Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre, TU Delft - BUS/TNO STAFF, TNO)
Pavel Aseev (Microsoft Quantum Lab Delft, TU Delft - BUS/Quantum Delft)
Kevin van Hoogdalem (Microsoft Quantum Lab Delft, TU Delft - BUS/Quantum Delft)
Leo P. Kouwenhoven (Microsoft Quantum Lab Delft, TU Delft - QuTech Advanced Research Centre, TU Delft - QN/Kouwenhoven Lab, Kavli institute of nanoscience Delft)
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Abstract
The realization of hybrid superconductor–semiconductor quantum devices, in particular a topological qubit, calls for advanced techniques to readily and reproducibly engineer induced superconductivity in semiconductor nanowires. Here, we introduce an on-chip fabrication paradigm based on shadow walls that offers substantial advances in device quality and reproducibility. It allows for the implementation of hybrid quantum devices and ultimately topological qubits while eliminating fabrication steps such as lithography and etching. This is critical to preserve the integrity and homogeneity of the fragile hybrid interfaces. The approach simplifies the reproducible fabrication of devices with a hard induced superconducting gap and ballistic normal-/superconductor junctions. Large gate-tunable supercurrents and high-order multiple Andreev reflections manifest the exceptional coherence of the resulting nanowire Josephson junctions. Our approach enables the realization of 3-terminal devices, where zero-bias conductance peaks emerge in a magnetic field concurrently at both boundaries of the one-dimensional hybrids.
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