Ultrashallow doping by excimer laser drive-in of RPCVD surface deposited arsenic monolayers

Conference Paper (2008)
Author(s)

M Popadic (TU Delft - Electronic Components, Technology and Materials)

Lis Nanver (TU Delft - Electronic Components, Technology and Materials)

C Biasotto (TU Delft - Microelectronics)

V Gonda (TU Delft - Old - EWI Sect. ECTM)

J. van der Cingel (TU Delft - Old - EWI Sect. ECTM)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
141-146
ISBN (print)
978-1-4244-1950-0

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