Ultrashallow doping by excimer laser drive-in of RPCVD surface deposited arsenic monolayers
Conference Paper
(2008)
Author(s)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
C Biasotto (TU Delft - Microelectronics)
V Gonda (TU Delft - Old - EWI Sect. ECTM)
J. van der Cingel (TU Delft - Old - EWI Sect. ECTM)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:61149eda-be9a-469a-b47f-a688977d112f
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
141-146
ISBN (print)
978-1-4244-1950-0
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