SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)
Conference Paper
(2007)
Author(s)
V Rajaraman (TU Delft - Electronic Instrumentation)
G Craciun (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
Paddy French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:61ccc1f2-3d3b-4254-8ee9-9404d96cf9c7
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Publication Year
2007
Research Group
Electronic Instrumentation
Pages (from-to)
617-620
ISBN (print)
978-90-73461-49-9
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