SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)

Rajaraman, V.; Craciun, G; Yang, H; van der Drift, EWJM; French, P. J.

SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)

Conference paper (2007)

Authors

V. Rajaraman Electronic Instrumentation

G Craciun Electronic Instrumentation

H Yang Electronic Instrumentation

EWJM van der Drift QN/Kavli Nanolab Delft

P. J. French Electronic Instrumentation

Research Group

Electronic Instrumentation

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Published Date

2007

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Research Group

Electronic Instrumentation

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