SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)

Conference paper (2007)

Authors

V. Rajaraman Electronic Instrumentation - EEMCS
G Craciun Electronic Instrumentation - EEMCS
H Yang Electronic Instrumentation - EEMCS
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation