Low-loss amorphous silicon carbide photonics and its heterogeneous integration with existing high performance active/passive platforms
B. Lopez Rodriguez (TU Delft - ImPhys/Esmaeil Zadeh group)
R.J.H. van der Kolk (Kavli institute of nanoscience Delft, TU Delft - QN/Kavli Nanolab Delft)
Samarth Aggarwal (University of Oxford)
Z.Z.L. Li (TU Delft - ImPhys/Esmaeil Zadeh group)
N. Sharma (TU Delft - ImPhys/Esmaeil Zadeh group)
T.C. Scholte (TU Delft - ImPhys/Pereira group)
Harish Bhaskaran (University of Oxford)
I.Z. Esmaeil Zadeh (TU Delft - ImPhys/Esmaeil Zadeh group)
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Abstract
In this work, we fabricate and characterize ring resonators on ICPCVD-deposited a-SiC films at a low temperature of 150°C, demonstrating exceptional intrinsic quality factors and low waveguide propagation losses, thus highlighting the potential for a-SiC as a valuable platform for future hybrid photonic technologies.