Low-loss amorphous silicon carbide photonics and its heterogeneous integration with existing high performance active/passive platforms
Bruno Lopez-Rodriguez (TU Delft - Applied Sciences)
Roald van der Kolk (Kavli institute of nanoscience Delft, TU Delft - Applied Sciences)
Samarth Aggarwal (University of Oxford)
Zizheng Li (TU Delft - Applied Sciences)
Naresh Sharma (TU Delft - Applied Sciences)
Thomas Scholte (TU Delft - Applied Sciences)
Harish Bhaskaran (University of Oxford)
Iman Esmaeil Zadeh (TU Delft - Applied Sciences)
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Abstract
In this work, we fabricate and characterize ring resonators on ICPCVD-deposited a-SiC films at a low temperature of 150°C, demonstrating exceptional intrinsic quality factors and low waveguide propagation losses, thus highlighting the potential for a-SiC as a valuable platform for future hybrid photonic technologies.