Optimization of the perimeter doping of ultrashallow p+-n¿-n+ photodiodes
Conference Paper
(2011)
Author(s)
T Knezevic (External organisation)
T Suligoj (External organisation)
A. Sakic (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:63da5f14-7c85-4ead-9b72-692b1dcc7072
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
44-48
ISBN (print)
978-1-4577-0996-8
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