Oxygen related defects in the top silicon layer of SIMOX: the effects of the thermal treatments
Journal Article
(2000)
Author(s)
A Rivera (TU Delft - Old - Section Defects in Materials)
JMM de Nijs (External organisation)
P Balk (External organisation)
A van Veen (TU Delft - Old - Section Defects in Materials)
H. Schut (TU Delft - Old - Section Defects in Materials)
Paul Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
Research Group
Old - Section Defects in Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:63e79e42-ecd6-421a-894a-dff9996c7855
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Publication Year
2000
Research Group
Old - Section Defects in Materials
Issue number
(1-3)
Volume number
73
Pages (from-to)
77-81
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