Direct spray coating of photoresist for MEMS applications
Conference Paper
(2001)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)
R Klerk (External organisation)
B Wieder (External organisation)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:6607e26e-21cf-4b05-a552-ee4ce63c8839
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
312-319
ISBN (print)
0-8194-4285-2
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