High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics
Journal Article
(2009)
Author(s)
T. Zoumpoulidis (TU Delft - Electronic Components, Technology and Materials)
M Bartek (TU Delft - Electronic Components, Technology and Materials)
P. de Graaf (External organisation)
R. Dekker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:6de3beb0-8ad9-4b07-9f50-8a36ac34fc67
More Info
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Issue number
1
Volume number
156
Pages (from-to)
257-264
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