Characterization of AlN thin films sputtered on Al Ti electrodes for piezoelectric devices
Conference Paper
(2010)
Author(s)
A.T. Tran (TU Delft - Electronic Components, Technology and Materials)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
C. Shen (TU Delft - Electronic Components, Technology and Materials)
TMH Pham (TU Delft - Old - EWI Sect. ECTM)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:6faed644-6405-454b-9dd0-5d8c9e9958f2
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
121-124
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