Buried oxide and defects in oxygen implanted Si monitored by positron annihilation

Journal article (2001)

Authors

AC Kruseman External organisation
A van Veen Old - Section Defects in Materials
H. Schut Old - Section Defects in Materials
P.E. Mijnarends Old - Section Defects in Materials
M Fujinami External organisation
Research Group
Old - Section Defects in Materials
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Published Date

2001

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials