A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint
Conference Paper
(2010)
Authors
F Santagata (TU Delft - Electronic Components, Technology and Materials)
E. Iervolino (Old - EWI Sect. ECTM)
J.M.W. Laros (TU Delft - Electronic Components, Technology and Materials)
J. Groeneweg (TU Delft - Electronic Components, Technology and Materials)
JF Creemer (TU Delft - Electronic Components, Technology and Materials)
AW van Herwaarden (External organisation)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://doi.org/10.1109/MEMSYS.2010.5442326
TU Delft Repository resolver:
https://resolver.tudelft.nl/79e65702-61b2-46ad-bd06-7fd3015940e3
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
643-646
ISBN (print)
978-1-4244-5764-9/10
DOI:
https://doi.org/10.1109/MEMSYS.2010.5442326
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