A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint

Conference paper (2010)

Authors

F. Santagata Electronic Components, Technology and Materials -

E. Iervolino Old - EWI Sect. ECTM

J.M.W. Laros Electronic Components, Technology and Materials -

J. Groeneweg Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

AW van Herwaarden External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

More Info

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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials