11 records found
1
A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint
Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom
Polyimide sacrificial layer for an all-dray post-process surface micromachining module
Polymide sacrificial layer for an all-dry post-process surface micromachining module
Wafer thinning for high-density, through-wafer interconnects
Micro injector fabrication process for a portable gas chromatograph
Design and fabrication of infrared detector arrays for satellite attitude control
Fabrication of a focal plane array infrared detector for a satellite attitude control system
IC-compatible two-level bulk micromachining for RF components
Design of infrared detector arrays for satellite attitude control
Low-stress PECVD SiC thin films for IC-compatible microstructures [niet eerder opgevoerd]