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S Milosavljevi¿
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2 records found
Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom
Conference paper -
S Milosavljevi¿
,
H. Schellevis
,
A. van den Bogaard
,
T.L.M. Scholtes
,
J.M.W. Laros
,
C.R. de Boer
,
E.J.G. Goudena
,
L.K. Nanver
Sub-100 nm silicon-nitride hard-mask for high aspect-ratio silicon fins
Conference paper -
V Jovanovi¿
,
S Milosavljevi¿
,
L.K. Nanver
,
T Suligoj
,
P Biljanovi¿