Polymide sacrificial layer for an all-dry post-process surface micromachining module

HTM Pham (TU Delft - Electronic Components, Technology and Materials)

A Bagolini (TU Delft - Electronic Components, Technology and Materials)

CR de Boer (TU Delft - Electronic Components, Technology and Materials)

JMW Laros (TU Delft - Electronic Components, Technology and Materials)

L Pakula (TU Delft - Electronic Instrumentation)

Patrick J. French (TU Delft - Electronic Instrumentation)

P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)