Polyimide sacrificial layer for an all-dray post-process surface micromachining module
Conference Paper
(2003)
Author(s)
TMH Pham (TU Delft - Electronic Components, Technology and Materials)
A Bagolini (External organisation)
C.R. De Boer (TU Delft - Electronic Components, Technology and Materials)
J.M.W. Laros (TU Delft - Electronic Components, Technology and Materials)
L.S. Pakula (TU Delft - Electronic Instrumentation)
Patrick J. French (TU Delft - Electronic Instrumentation)
Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:4c1fad54-8ab7-4f75-bbe7-4a8cc40fec3f
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Publication Year
2003
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
813-816
ISBN (print)
0-7803-7731-1
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