Polyimide sacrificial layer for an all-dray post-process surface micromachining module

Pham, TMH; Bagolini, A; De Boer, CR; Laros, J.M.W.; Pakula, L.S.; French, Patrick J.; Sarro, PM

Polyimide sacrificial layer for an all-dray post-process surface micromachining module

Conference paper (2003)

Authors

TMH Pham Electronic Components, Technology and Materials

A Bagolini External organisation

CR De Boer Electronic Components, Technology and Materials

J.M.W. Laros Electronic Components, Technology and Materials

L.S. Pakula Electronic Instrumentation

Patrick J. French Electronic Instrumentation

PM Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2003

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Research Group

Electronic Components, Technology and Materials

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