IC-compatible two-level bulk micromachining for RF components
Conference Paper
(1999)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
TK Ng (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
JMW Laros (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:657185b4-93ac-46e7-9517-5985f3fb7034
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
359-362
ISBN (print)
90-73461-18-9
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