Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst
Conference Paper
(2013)
Author(s)
S Vollebregt (TU Delft - Electronic Components, Technology and Materials)
H Schellevis (TU Delft - Electronic Components, Technology and Materials)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/IITC.2013.6615602
To reference this document use:
https://resolver.tudelft.nl/uuid:7a219ae5-8521-497c-94a3-f27d3a40e603
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-3
ISBN (print)
978-1-4799-0439-6
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