Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst

Vollebregt, Sten; Schellevis, H; Beenakker, CIM; Ishihara, R

Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst

Conference paper (2013)

Authors

Sten Vollebregt Electronic Components, Technology and Materials

H Schellevis Electronic Components, Technology and Materials

CIM Beenakker Electronic Components, Technology and Materials

R Ishihara Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2013

Language

English

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Research Group

Electronic Components, Technology and Materials

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