Multi Beam electron source for nanofabrication using electron beam induced deposition
Journal Article
(2006)
Author(s)
MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:7b27a1f4-64ce-4363-83c9-566eca2e399f
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Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
4-9
Volume number
83
Pages (from-to)
771-775
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