Multi Beam electron source for nanofabrication using electron beam induced deposition

Journal Article (2006)
Author(s)

MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)

B van Someren (TU Delft - ImPhys/Charged Particle Optics)

Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)

Research Group
ImPhys/Charged Particle Optics
More Info
expand_more
Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
4-9
Volume number
83
Pages (from-to)
771-775

No files available

Metadata only record. There are no files for this record.