Corner rounding-powerful tool for uniform photoresist coating
Conference Paper
(2001)
Author(s)
VG Kutchoukov (TU Delft - Electronic Instrumentation)
M Bao (External organisation)
M Shikida (External organisation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
A. Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:7e10b191-8edd-426a-b73a-38666980421a
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
73-80
ISBN (print)
954-9518-15-9
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