7 records found
1
Modified Reynold's equation and analytical analysis of squeeze-film air damping of perforated structures
Modified Reynolds' equation for squeeze-film air damping of hole-plates
Corner rounding-powerful tool for uniform photoresist coating
Forming rounded convex corner by using two-step anisotropic koh wet etching
Effects of gas flow in holes on the squeeze film damping of perforated structures
Damping caused by the gas flow in the holes of perforated structures
Etching behavior of KOH at the convex corner