7 records found
1
Modified Reynold's equation and analytical analysis of squeeze-film air damping of perforated structures
Modified Reynolds' equation for squeeze-film air damping of hole-plates
Damping caused by the gas flow in the holes of perforated structures
Corner rounding-powerful tool for uniform photoresist coating
Forming rounded convex corner by using two-step anisotropic koh wet etching
Effects of gas flow in holes on the squeeze film damping of perforated structures
Etching behavior of KOH at the convex corner