Forming rounded convex corner by using two-step anisotropic koh wet etching
Conference Paper
(2001)
Author(s)
VG Kiutchoukov (External organisation)
M Shikida (External organisation)
M Bao (External organisation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
A Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:2800c525-6dce-4f63-81ba-3e3b4c0af803
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
161-166
ISBN (print)
0-7923-7012-0
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