Oxygen implanted silicon investigated by positron annihilation spectroscopy
Journal Article
(1999)
Author(s)
AC Kruseman (External organisation)
H. Schut (TU Delft - Old - Section Defects in Materials)
A van Veen (TU Delft - Old - Section Defects in Materials)
M Fujinami (External organisation)
Research Group
Old - Section Defects in Materials
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Publication Year
1999
Research Group
Old - Section Defects in Materials
Volume number
148
Pages (from-to)
294-299
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