Oxygen implanted silicon investigated by positron annihilation spectroscopy

Journal article (1999)

Authors

AC Kruseman External organisation
H. Schut Old - Section Defects in Materials
A van Veen Old - Section Defects in Materials
M Fujinami External organisation
Research Group
Old - Section Defects in Materials
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials