Near-ideal implanted shallow-junction diode formation by excimer laser annealing
Conference Paper
(2005)
Author(s)
V Gonda (TU Delft - Electronic Components, Technology and Materials)
A Bourtsev (TU Delft - Electronic Components, Technology and Materials)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:7f22ca72-aa83-4c8b-8f11-b78cad108a95
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Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
93-100
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