Simulation and analytical calculation of reflowed resist structures

Emadi, A.; Wu, H.W.; Grabarnik, S; Graaf, G.; Wolfenbuttel, Reinoud

Simulation and analytical calculation of reflowed resist structures

Conference paper (2008)

Authors

A. Emadi Electronic Instrumentation

H.W. Wu Electronic Instrumentation

S Grabarnik Electronic Instrumentation

G. Graaf Electronic Instrumentation

Reinoud Wolfenbuttel Electronic Instrumentation

Research Group

Electronic Instrumentation

Conference contrib. non-refer.

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Published Date

2008

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Research Group

Electronic Instrumentation

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