Single-grain Si TFTs using spin-coated liquid-silicon

Conference Paper (2011)
Author(s)

J Zhang (TU Delft - Old - EWI Sect. ECTM)

R. Ishihara (TU Delft - Electronic Components, Technology and Materials)

H Tagagishi (External organisation)

R Kawajiri (External organisation)

T Shimoda (External organisation)

Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Old - EWI Sect. ECTM
DOI related publication
https://doi.org/10.1109/IEDM.2011.6131553
More Info
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Publication Year
2011
Language
English
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
1-4
ISBN (print)
978-1-4577-0505-2

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