TS
T Shimoda
Authored
20 records found
Printing of electronics has been gaining a lot of attention over the past decade as a low cost alternative to conventional electronic fabrication methods. A significant development in this area was the possibility to print a silicon precursor, polydihydrosilane, which can directl
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Printing of electronics is pursued as a low-cost alternative to conventional manufacturing processes. In addition, owing to relatively low process temperatures, flexible substrates can be used enabling novel applications. Among flexible substrates, paper was found to be a particu
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High-performance Si thin-film transistors (TFTs) are fabricated inside a single, location-controlled grain with gate SiO/sub 2/ deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD). The position of the large grains is controlled by /spl
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High-performance Si thin-film transistors (TFTs) are fabricated inside a single, location-controlled grain with gate SiO/sub 2/ deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD). The position of the large grains is controlled by /spl
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High-performance Si thin-film transistors (TFTs) are fabricated inside a single, location-controlled grain with gate SiO/sub 2/ deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD). The position of the large grains is controlled by /spl
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Solution-processing has gained widespread attention over the past years due to their potential low-cost advantage in terms of fabrication of electronics as well as application to flexible electronics. Cyclopentasilane is used for the solution-based processing of silicon. As a liq
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Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350oC of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrat
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