(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics

Journal article (2018)

Authors

R. Ishihara Quantum Integration Technology , QID/Ishihara Lab - QuTech Advanced Research Centre
M. Trifunovic QID/Ishihara Lab - QuTech Advanced Research Centre
P.M. Sberna EKL Equipment - EEMCS
T Shimoda Japan Advanced Institute of Science and Technology
Research Group
QID/Ishihara Lab (QuTech Advanced Research Centre) (TU Delft)
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Published Date

2018

Language

English

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Faculty

QuTech Advanced Research Centre

Department

Quantum Internet Division

Research Group

QID/Ishihara Lab

Abstract

Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350oC of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with doctor-blade coating and local irradiation of excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on the paper. This technique will breakthrough the printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.