Opto-mechanical ultrasound sensor based on sensitive silicon-photonic split rib-type waveguide

Conference paper (2019)

Authors

W.J. Westerveld IMEC-Solliance
Md. Mahmud-Ul-Hasan IMEC-Solliance
Roelof Jansen IMEC-Solliance
X. Rottenberg IMEC-Solliance
Simone Severi IMEC-Solliance
Veronique Rochus IMEC-Solliance
Affiliation
External organisation
More Info
expand_more

Published Date

2019

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Affiliation

External organisation

Abstract

Ultrasonography is widely used in (bio-)medical imaging and especially photo-acoustic imaging is rapidly advancing towards new applications. Future applications require a matrix of small (λ/2) and sensitive ultrasound sensors with read-out through a thin and flexible cable [1]. We target ∼15 MHz ultrasound for e.g. catheter-based intravascular imaging or for freely-moving mouse brain imaging. Integrated optical sensors have good prospects: small and sensitive sensors [2,3], wafer-scale fabrication, and matrix read-out via single optical fiber using on-chip wavelength-division multiplexing (WDM) [4]. Polymer waveguide ring-resonator showed good sensitivity and bandwidth [2] but large device footprint hampers WDM. Silicon photonic waveguides are less susceptible to direct ultrasound but opto-mechanical ultrasound sensors (OMUS), with the photonic resonator integrated in an acoustically resonant membrane, showed high sensitivity [3].