PECVD silicon carbide surface micriomachining technology and selected MEMS applications
Journal Article
(2011)
Author(s)
V. Rajaraman (TU Delft - Electronic Instrumentation)
L.S. Pakula (TU Delft - Electronic Components, Technology and Materials, TU Delft - Electronic Instrumentation)
Yang (External organisation)
PJ French (TU Delft - Electronic Instrumentation)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1007/s12572-010-0020-9
To reference this document use:
https://resolver.tudelft.nl/uuid:86f75d50-e999-4286-976b-50ab0879f04a
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1-7
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