PECVD silicon carbide surface micriomachining technology and selected MEMS applications

Journal article (2011)

Authors

V. Rajaraman Electronic Instrumentation - EEMCS
L.S. Pakula Electronic Components, Technology and Materials - EEMCS , Electronic Instrumentation - EEMCS
None Yang External organisation
P.J. French Electronic Instrumentation - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation