Realization of high aspect ratio interconnections based on macroporous silicon
Conference Paper
(2002)
Author(s)
A Nichelatti (TU Delft - Electronic Components, Technology and Materials)
NT Nguyen (TU Delft - Electronic Components, Technology and Materials)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:877c936f-43d9-4ae2-846f-7e00aaac8df9
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4
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