Realization of high aspect ratio interconnections based on macroporous silicon
Conference Paper
(2002)
Author(s)
A Nichelatti (TU Delft - Electronic Components, Technology and Materials)
NT Nguyen (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
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Publication Year
2002
Pages (from-to)
1-4
Publisher
Czech Technical University in Prague
Event
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